Featured SIOS High-Precision Systems
Coordinate Metrology
Nanomeasuring Machine(NMM-1)
Product Purpose: Absolute sub-nanometer precision coordinate metrology for the characterization of microstructures, semiconductor components, and optics.
Key Capabilities: 3D positioning, surface scanning, and ultra-precise geometry testing.
Length & Angle
Triple-Beam Laser Interferometer (SP 5000 TR)
Product Purpose: High-precision simultaneous length and angle measurements for calibration and machine alignment.
Key Capabilities: Triple-beam technology allows ultra-precise tracking of pitch, yaw, and displacement.
Vibration Measurement
High-Precision Laser Vibrometers
Product Purpose: Non-contact, high-dynamic vibration measurement on micro-components, sensors, and structural surfaces.
Key Capabilities: Captures mechanical oscillations, frequency response, and acoustic profiles without loading the target.