Hyulim: Wafer Transfer Robot
Weight: 70kg Degree of Freedom: 4 Reach: 1090mm Z Stroke: 50mm Payload: 0.7kg (Including the hand) Position Repeatability: ±0.1 mm Cleanliness: Class 1 (0.1 μm/cf)
Product Description: - High Speed Transfer - Configuration optimized from high vacuum to low vacuum and N2 environment - Dry bearing
Weight: 20kg Degree of Freedom: 3 Reach: 510mm Z Stroke: 300mm Payload: 3kg (Including the hand) Position Repeatability: ±0.1 mm Cleanliness: Class 1 (0.1 μm/cf)
Weight: 27kg Degree of Freedom: 4 Reach: 1020mm Z Stroke: 300mm Payload: 3kg per arm (Including the hand) Position Repeatability: ±0.1 mm Cleanliness: Class 1 (0.1 μm/cf)
Weight: 29kg Degree of Freedom: 3 + 1 Reach: 510mm Z Stroke: 300mm Payload: 0.5kg (Including the hand) Position Repeatability: ±0.1 mm Cleanliness: Class 1 (0.1 μm/cf)
Product Description: - High Speed Transfer - Flexible customizing possible through modularization of standard products
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