Weight: 70kg
Degree of Freedom: 3
Reach: 1030mm
Z Stroke: 100mm
Payload: 4kg (Including the hand)
Position Repeatability: ±0.1 mm
Cleanliness: Class 1 (0.1 μm/cf)
Weight: 280kg
Degree of Freedom: 3
Reach: 2240mm
Z Stroke: 300mm
Payload: 15kg (Including the hand)
Position Repeatability: ±0.1 mm
Cleanliness: Class 1 (0.1 μm/cf)
Weight: 280kg
Degree of Freedom: 4
Reach: 3370mm
Z Stroke: 350mm
Payload: 15kg (Including the hand)
Position Repeatability: ±0.1 mm
Cleanliness: Class 1 (0.1 μm/cf)
Weight: 2000kg
Degree of Freedom: 4
Reach: 4950mm
Z Stroke: 350mm
Payload: 50kg (Including the hand)
Position Repeatability: ±0.1 mm
Cleanliness: Class 1 (0.1 μm/cf)
Weight: 160kg
Degree of Freedom: 2
Reach: 2600mm
Payload: 30kg (Including the end-effector)
Cleanliness: Class 1 (0.1 μm/cf)
Weight: 1700kg
Degree of Freedom: 4
Reach: 5788mm
Z Stroke: 450mm
Payload: 50kg (Including the hand)
Position Repeatability: ±0.5 mm
Cleanliness: Class 3
Weight: 1900kg
Degree of Freedom: 4
Reach: 7800mm
Z Stroke: 680mm
Payload: 120kg (Including the hand)
Position Repeatability: ±0.5 mm
Cleanliness: Class 4
Product Description:
- Operate in a high speed, accuracy, rigidity and low vibration despite having a longer stroke
- It is light-weight
- Configuration optimized from high vacuum to low vacuum and N2 environment
Weight: 85kg/ 90kg/ 95kg
Degree of Freedom: 3
Reach: 1120mm
Z Stroke: 400mm/ 520mm/ 600mm
Payload: 5kg (Including the hand)
Position Repeatability: ±0.1 mm
Cleanliness: Class 10
Weight: 210kg/ 230kg
Degree of Freedom: 3
Reach: 1460mm
Z Stroke: 800mm/ 1000mm
Payload: 10kg (Including the hand)
Position Repeatability: ±0.1 mm
Cleanliness: Class 10
Weight: 100kg/ 105kg/ 110kg
Degree of Freedom: 4
Reach: 1120mm
Z Stroke: 400mm/ 520mm/ 600mm
Payload: 5kg (Including the hand)
Position Repeatability: ±0.1 mm
Cleanliness: Class 10
Weight: 250kg/ 270kg
Degree of Freedom: 4
Reach: 1460mm
Z Stroke: 800mm/ 1000mm
Payload: 10kg (Including the hand)
Position Repeatability: ±0.1 mm
Cleanliness: Class 10
Weight: 100kg/ 105kg/ 110kg
Degree of Freedom: 3 + 1
Reach: 1120mm
Z Stroke: 400mm/ 520mm/ 600mm
Payload: 4kg (Including the hand)
Position Repeatability: ±0.2 mm
Cleanliness: Class 10
Weight: 225kg/ 245kg
Degree of Freedom: 3 + 1
Reach: 1460mm
Z Stroke: 800mm/ 1000mm
Payload: 10kg (Including the hand)
Position Repeatability: ±0.2 mm
Cleanliness: Class 10
Product Description:
- A large liquid crystal substrate can be vertically inverted and transported
- Wide range of track record from array process to cell process return
- Simple mechanical structure forms high-efficiency air flow
